TY  - CONF
AU  - Saleh, R.
AU  - Munisa, L.
AU  - Beyer, W.
TI  - Microstructure and hydrogen stability characterization of amorphous silicon-carbon (a-Si:C:H) films prepared by DC magnetron sputtering
M1  - PreJuSER-60122
PY  - 2000
N1  - Record converted from VDB: 12.11.2012
Y2  - 7 Aug 2000
M2  - Taipei, 
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/60122
ER  -