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%0 Conference Paper %A Repmann, T. %A Appenzeller, W. %A Roschek, T. %A Rech, B. %A Wagner, H. %T Large area deposition of intrinsic microcrystalline silicon for thin film solar cells %M PreJuSER-60135 %D 2000 %Z Record converted from VDB: 12.11.2012 %< 28th IEEE Photovoltaic Specialists Conference Y2 17 Sep 2000 M2 Anchorage, %F PUB:(DE-HGF)24 %9 Poster %U https://juser.fz-juelich.de/record/60135