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TY - CONF AU - Repmann, T. AU - Appenzeller, W. AU - Roschek, T. AU - Rech, B. AU - Wagner, H. TI - Large area deposition of intrinsic microcrystalline silicon for thin film solar cells M1 - PreJuSER-60135 PY - 2000 N1 - Record converted from VDB: 12.11.2012 Y2 - 17 Sep 2000 M2 - Anchorage, LB - PUB:(DE-HGF)24 UR - https://juser.fz-juelich.de/record/60135 ER -