TY  - CONF
AU  - Rath, J. K.
AU  - Schropp, R. E. I.
AU  - Beyer, W.
TI  - Hydrogen diffusion through deformed Si-Si bonds at grain boundary in hot-wire CVD polycrystalline silicon films
M1  - PreJuSER-60144
PY  - 2000
N1  - Record converted from VDB: 12.11.2012
Y2  - 3 Sep 2000
M2  - Saint Malo, 
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/60144
ER  -