TY - JOUR
AU - Meier, M.
AU - Gilles, S.
AU - Rosezin, R.
AU - Schindler, S.
AU - Trellenkamp, S.
AU - Rüdiger, A.
AU - Mayer, D.
AU - Kügeler, C.
AU - Waser, R.
TI - Resistively switching Pt/Spin-on glass/Ag nanocells for non-volatile memories fabricated with UV nanoimprint lithography
JO - Microelectronic engineering
VL - 86
SN - 0167-9317
CY - [S.l.] @
PB - Elsevier
M1 - PreJuSER-6109
PY - 2009
N1 - Record converted from VDB: 12.11.2012
AB - Resistively switching materials are in the focus of investigations for use in next-generation non-volatile resistive random access memories (RRAM). Crossbar structures with integrated resistively switching spin-on glass were fabricated using UV nanoimprint lithography. 32 x 32 bit crossbar arrays with a half pitch of 50 nm were achieved. The switching characteristic of our Pt/spin-on glass/Ag material stack was proved on 100 x 100 nm(2) nanocells. It shows resistance switching behavior which is comparable to material systems where the formation and dissolution of metallic filaments through a porous matrix is assumed to be the responsible switching mechanism. (C) 2009 Elsevier B.V. All rights reserved.
KW - J (WoSType)
LB - PUB:(DE-HGF)16
UR - <Go to ISI:>//WOS:000267273300158
DO - DOI:10.1016/j.mee.2009.01.054
UR - https://juser.fz-juelich.de/record/6109
ER -