%0 Journal Article
%A He, Ch.
%A Jung, P.
%T Dimensional changes of AI2O3, MgO, MgAI2O4, AIN and Si3N4 by helium implantation
%J Nuclear instruments & methods in physics research / B
%V 166-167
%@ 0168-583X
%C Amsterdam [u.a.]
%I Elsevier
%M PreJuSER-62924
%P 165
%D 2000
%Z Record converted from VDB: 12.11.2012
%F PUB:(DE-HGF)16
%9 Journal Article
%U https://juser.fz-juelich.de/record/62924