TY  - JOUR
AU  - He, Ch.
AU  - Jung, P.
TI  - Dimensional changes of AI2O3, MgO, MgAI2O4, AIN and Si3N4 by helium implantation
JO  - Nuclear instruments & methods in physics research / B
VL  - 166-167
SN  - 0168-583X
CY  - Amsterdam [u.a.]
PB  - Elsevier
M1  - PreJuSER-62924
SP  - 165
PY  - 2000
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)16
UR  - https://juser.fz-juelich.de/record/62924
ER  -