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@PHDTHESIS{Patt:807741,
author = {Patt, Marten Christopher},
title = {{B}ulk and surface sensitive energy-filtered photoemission
microscopy using synchrotron radiation for the study of
resistive switching memories},
volume = {122},
school = {Universität Duisburg},
type = {Dr.},
address = {Jülich},
publisher = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
reportid = {FZJ-2016-02159},
isbn = {978-3-95806-130-9},
series = {Schriften des Forschungszentrums Jülich. Reihe
Schlüsseltechnologien / Key Technologies},
pages = {VIII, 247 S.},
year = {2016},
note = {Universität Duisburg, Diss., 2016},
abstract = {In this thesis the applicability of energy-filtered
photoemission microscopy for the analysis of future
electronic devices for the information technology is
studied. The long-term perspective is the analysis of the
switching-dynamics in oxide-based nonvolatile resistive
memories. These are regarded as promising new components in
the development of more powerful processing units or storage
devices, since the improvements of the classical silicon or
magnetism-based technologies are approaching their physical
limits. Nevertheless, the efficiency and functionality of
suitable material systems strongly depend on the quality and
properties of their surfaces and interfaces. The
energy-filtered photoemission microscopy provides a
spatially resolved chemical study of these systems,
especially in combination with high brilliance synchrotron
light sources. The high photon intensities are needed, if
characteristic core levels of a specimen should be analyzed
with a high spatial and energy resolution. Studies of
metal-insulator-metal structures based on the valence change
effect in strontium titanate, which is a model system for
resistive switching devices, showed that the spatial
resolution needs to be in the 100 nm regime and the
energy-resolution in the 100 meV regime to resolve the
relevant changes in a switching cycle. Therefore, a big
focus of this thesis lies on the determination of the
relevant experimental parameters which are needed to fulfill
these requirements. Another challenging task is to study the
functional layer of such a device through a capping
electrode. Hard X-ray synchrotron radiation allows the use
of high kinetic energy photoelectrons with an up to ten
times lager information depth. In this thesis it is shown
for the first time, which spatial resolution can be achieved
when detecting chemically different regions through cover
layer thicknesses of up to 15 nm. Microscope-relevant topics
like transmission and aberration effects are discussed with
respect to the use of high kinetic electrons and illustrated
by calculations.},
cin = {PGI-6},
cid = {I:(DE-Juel1)PGI-6-20110106},
pnm = {899 - ohne Topic (POF3-899)},
pid = {G:(DE-HGF)POF3-899},
typ = {PUB:(DE-HGF)3 / PUB:(DE-HGF)11},
url = {https://juser.fz-juelich.de/record/807741},
}