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@PHDTHESIS{Blaeser:808932,
author = {Blaeser, Sebastian},
title = {{S}trained {S}ilicon-{G}ermanium/{S}ilicon
{H}eterostructure {T}unnel {FET}s for {L}ow {P}ower
{A}pplications},
volume = {124},
school = {RWTH Aachen},
type = {Dr.},
address = {Jülich},
publisher = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
reportid = {FZJ-2016-02452},
isbn = {978-3-95806-135-4},
series = {Schriften des Forschungszentrums Jülich. Reihe
Schlüsseltechnologien / Key Technologies},
pages = {IV, 91, XVII S.},
year = {2016},
note = {RWTH Aachen, Diss., 2016},
abstract = {Scaling of nanoelectronics consequently comes along with
power consumption in integrated circuits, either in terms of
static power consumption P$_{static}$ due to different
leakage contributions or in terms of dynamic power
consumption P$_{dynamic}$, accounting for the power density
arising in an integrated circuit and thus, restricting an
arbitrary miniaturization. Since dynamic power consumption
scales with the second power of the supply voltage,
P$_{dynamic} \varpropto V^{2}_{DD}$, a reduction of the
latter represents a promising approach in order to enable
low power electronics. However, a reduction of the supply
voltage V$_{DD}$ inevitably results in an either lowered
on-current I$_{on}$ or increased off-current I$_{off}$ of a
metal-oxide-semiconductor field-effect transistor (MOSFET).
A reduction of the subthreshold swing $\textit{SS}$ of the
transistor as a measure of the steepness of its transition
from the off- to the on-state in turn allows for a reduction
of the supply voltage V$_{DD}$ without accepting an either
lowered on-current I$_{on}$ or increased off-current
I$_{off}$. However, since charge transport in a MOSFET is
based on thermionic emission over a potential barrier due to
a broadened Fermi distribution function, its subthreshold
swing $\textit{SS}$ is limited to 60mV/dec at room
temperature T = 300K. In order to overcome this inherent
limitation of a MOSFET and allow for a smaller subthreshold
swing $\textit{SS}$, the tunnel field-effect transistor
(TFET) has been suggested as a promising alternative due to
its charge transport realized by means of quantum mechanical
band-to-band tunneling (BTBT). Within the framework of this
thesis, two different proposals of a TFET device concept
allowing for low power applications are investigated. As a
first approach, a vertical Silicon-Germanium/Silicon
(SiGe/Si) heterostructure TFET is considered which makes use
ofstrained SiGe as a material with smaller band gap E$_{g}$
at the source tunnel junction in order to increase the
probability for BTBT while suppressing the ambipolar
switching characteristics in parallel due to the use of Si
with its higher band gap E$_{g}$ as compared to SiGe at the
drain tunnel junction, thus enabling a heterostructure
device concept. As a second approach, a planar SiGe/Si
heterostructure TFET is presented which not only makes use
of strained SiGe as a material with smaller band gap E$_{g}$
at the source tunnel junction, but also benefits from a
selective and self-adjusted silicidation in combination with
a counter doped pocket at the source tunnel junction in
order to enable line tunneling aligned with the gate
electric field lines in an enlarged area directly underneath
the gate. In addition, for both types of TFETs, technology
computer aided design (TCAD) simulations are consulted in
order to evaluate the respective experimental results as
well as to illustrate potential improvements of each device
concept. [...]},
cin = {PGI-9},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {899 - ohne Topic (POF3-899)},
pid = {G:(DE-HGF)POF3-899},
typ = {PUB:(DE-HGF)11},
urn = {urn:nbn:de:0001-2016063011},
url = {https://juser.fz-juelich.de/record/808932},
}