TY  - JOUR
AU  - Beyene, Girum
AU  - Tobin, Isaac
AU  - Juschkin, Larissa
AU  - Hayden, Patrick
AU  - O’Sullivan, Gerry
AU  - Sokell, Emma
AU  - Zakharov, Vassily S
AU  - Zakharov, Sergey V
AU  - O’Reilly, Fergal
TI  - Laser-assisted vacuum arc extreme ultraviolet source: a comparison of picosecond and nanosecond laser triggering
JO  - Journal of physics / D
VL  - 49
IS  - 22
SN  - 1361-6463
CY  - Bristol
PB  - IOP Publ.
M1  - FZJ-2016-02786
SP  - 225201 -
PY  - 2016
AB  - Extreme ultraviolet (EUV) light generation by hybrid laser-assisted vacuum arc discharge plasmas, utilizing Sn-coated rotating-disc-electrodes, was investigated. The discharge was initiated by localized ablation of the liquid tin coating of the cathode disc by a laser pulse. The laser pulse, at 1064 nm, was generated by Nd:YAG lasers with variable energy from 1 to 100 mJ per pulse. The impact of shortening the laser pulse from 7 ns to 170 ps on the EUV generation has been investigated in detail. The use of ps pulses resulted in an increase in emission of EUV radiation. With a fixed discharge energy of ~4 J, the EUV conversion efficiency tends to plateau at ~2.4  ±  0.25% for the ps laser pulses, while for the ns pulses, it saturates at ~1.7  ±  0.3%. Under similar discharge and laser energy conditions, operating the EUV source with the ps-triggering resulted also in narrower spectral profiles of the emission in comparison to ns-triggering. The results indicate an advantage in using ps-triggering in laser-assisted discharges to produce brighter plasmas required for applications such as metrology.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000377410800009
DO  - DOI:10.1088/0022-3727/49/22/225201
UR  - https://juser.fz-juelich.de/record/809860
ER  -