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@ARTICLE{Beyene:809860,
      author       = {Beyene, Girum and Tobin, Isaac and Juschkin, Larissa and
                      Hayden, Patrick and O’Sullivan, Gerry and Sokell, Emma and
                      Zakharov, Vassily S and Zakharov, Sergey V and O’Reilly,
                      Fergal},
      title        = {{L}aser-assisted vacuum arc extreme ultraviolet source: a
                      comparison of picosecond and nanosecond laser triggering},
      journal      = {Journal of physics / D},
      volume       = {49},
      number       = {22},
      issn         = {1361-6463},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {FZJ-2016-02786},
      pages        = {225201 -},
      year         = {2016},
      abstract     = {Extreme ultraviolet (EUV) light generation by hybrid
                      laser-assisted vacuum arc discharge plasmas, utilizing
                      Sn-coated rotating-disc-electrodes, was investigated. The
                      discharge was initiated by localized ablation of the liquid
                      tin coating of the cathode disc by a laser pulse. The laser
                      pulse, at 1064 nm, was generated by Nd:YAG lasers with
                      variable energy from 1 to 100 mJ per pulse. The impact of
                      shortening the laser pulse from 7 ns to 170 ps on the EUV
                      generation has been investigated in detail. The use of ps
                      pulses resulted in an increase in emission of EUV radiation.
                      With a fixed discharge energy of ~4 J, the EUV conversion
                      efficiency tends to plateau at $~2.4  ±  0.25\%$
                      for the ps laser pulses, while for the ns pulses, it
                      saturates at $~1.7  ±  0.3\%.$ Under similar
                      discharge and laser energy conditions, operating the EUV
                      source with the ps-triggering resulted also in narrower
                      spectral profiles of the emission in comparison to
                      ns-triggering. The results indicate an advantage in using
                      ps-triggering in laser-assisted discharges to produce
                      brighter plasmas required for applications such as
                      metrology.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000377410800009},
      doi          = {10.1088/0022-3727/49/22/225201},
      url          = {https://juser.fz-juelich.de/record/809860},
}