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| Hauptseite > Publikationsdatenbank > Laser-assisted vacuum arc extreme ultraviolet source: a comparison of picosecond and nanosecond laser triggering > print |
| Hauptseite > Publikationsdatenbank > Laser-assisted vacuum arc extreme ultraviolet source: a comparison of picosecond and nanosecond laser triggering > print |
| 001 | 809860 | ||
| 005 | 20210129223152.0 | ||
| 024 | 7 | _ | |a 10.1088/0022-3727/49/22/225201 |2 doi |
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| 100 | 1 | _ | |a Beyene, Girum |0 P:(DE-Juel1)162453 |b 0 |e Corresponding author |
| 245 | _ | _ | |a Laser-assisted vacuum arc extreme ultraviolet source: a comparison of picosecond and nanosecond laser triggering |
| 260 | _ | _ | |a Bristol |c 2016 |b IOP Publ. |
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| 520 | _ | _ | |a Extreme ultraviolet (EUV) light generation by hybrid laser-assisted vacuum arc discharge plasmas, utilizing Sn-coated rotating-disc-electrodes, was investigated. The discharge was initiated by localized ablation of the liquid tin coating of the cathode disc by a laser pulse. The laser pulse, at 1064 nm, was generated by Nd:YAG lasers with variable energy from 1 to 100 mJ per pulse. The impact of shortening the laser pulse from 7 ns to 170 ps on the EUV generation has been investigated in detail. The use of ps pulses resulted in an increase in emission of EUV radiation. With a fixed discharge energy of ~4 J, the EUV conversion efficiency tends to plateau at ~2.4 ± 0.25% for the ps laser pulses, while for the ns pulses, it saturates at ~1.7 ± 0.3%. Under similar discharge and laser energy conditions, operating the EUV source with the ps-triggering resulted also in narrower spectral profiles of the emission in comparison to ns-triggering. The results indicate an advantage in using ps-triggering in laser-assisted discharges to produce brighter plasmas required for applications such as metrology. |
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| 773 | _ | _ | |a 10.1088/0022-3727/49/22/225201 |g Vol. 49, no. 22, p. 225201 - |0 PERI:(DE-600)1472948-9 |n 22 |p 225201 - |t Journal of physics / D |v 49 |y 2016 |x 1361-6463 |
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