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000809863 1001_ $$0P:(DE-HGF)0$$aSertsu, M. G.$$b0$$eCorresponding author
000809863 245__ $$aAnalysis of buried interfaces in multilayer mirrors using grazing incidence extreme ultraviolet reflectometry near resonance edges
000809863 260__ $$aWashington, DC$$bSoc.77209$$c2015
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000809863 520__ $$aAccurate measurements of optical properties of multilayer (ML) mirrors and chemical compositions of interdiffusion layers are particularly challenging to date. In this work, an innovative and nondestructive experimental characterization method for multilayers is discussed. The method is based on extreme ultraviolet (EUV) reflectivity measurements performed on a wide grazing incidence angular range at an energy near the absorption resonance edge of low-Z elements in the ML components. This experimental method combined with the underlying physical phenomenon of abrupt changes of optical constants near EUV resonance edges enables us to characterize optical and structural properties of multilayers with high sensitivity. A major advantage of the method is to perform detailed quantitative analysis of buried interfaces of multilayer structures in a nondestructive and nonimaging setup. Coatings of Si/Mo multilayers on a Si substrate with period 
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000809863 7001_ $$0P:(DE-HGF)0$$aMaurizio, C.$$b4
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000809863 999C5 $$1Folta$$2Crossref$$9-- missing cx lookup --$$a10.1117/12.351156$$p702 -$$tProc. SPIE$$v3676$$y1999
000809863 999C5 $$1Wedowski$$2Crossref$$oWedowski 2000$$y2000
000809863 999C5 $$1Stearns$$2Crossref$$9-- missing cx lookup --$$a10.1063/1.368098$$p1003 -$$tJ. Appl. Phys.$$v84$$y1998
000809863 999C5 $$1Martinez-Galarce$$2Crossref$$9-- missing cx lookup --$$a10.1117/1.OE.52.9.095102$$p095102 -$$tOpt. Eng.$$v52$$y2013
000809863 999C5 $$1Gibaud$$2Crossref$$oGibaud 2000$$y2000
000809863 999C5 $$1Halain$$2Crossref$$9-- missing cx lookup --$$a10.1117/12.924343$$p844307 -$$tProc. SPIE$$v8443$$y2012
000809863 999C5 $$1Muller$$2Crossref$$9-- missing cx lookup --$$a10.1007/s11207-012-0085-7$$p25 -$$tSolar Phys.$$v285$$y2013
000809863 999C5 $$1Makhotkin$$2Crossref$$9-- missing cx lookup --$$a10.1117/1.JMM.11.4.040501$$p040501 -$$tJ. Micro/Nanolithogr. MEMS MOEMS$$v11$$y2012
000809863 999C5 $$1Makhotkin$$2Crossref$$9-- missing cx lookup --$$a10.1364/OE.20.011778$$p11778 -$$tOpt. Express$$v20$$y2012
000809863 999C5 $$1Makhotkin$$2Crossref$$9-- missing cx lookup --$$a10.1364/OE.21.029894$$p29894 -$$tOpt. Express$$v21$$y2013
000809863 999C5 $$1Yakunin$$2Crossref$$9-- missing cx lookup --$$a10.1364/OE.22.020076$$p20076 -$$tOpt. Express$$v22$$y2014
000809863 999C5 $$1Le Guen$$2Crossref$$9-- missing cx lookup --$$a10.1021/jp911119z$$p6484 -$$tJ. Phys. Chem. C$$v114$$y2010
000809863 999C5 $$1Giday$$2Crossref$$9-- missing cx lookup --$$a10.1117/12.2027295$$p886111 -$$tProc. SPIE$$v8861$$y2013
000809863 999C5 $$1Modi$$2Crossref$$9-- missing cx lookup --$$a10.1016/S0921-4526(02)01539-9$$p272 -$$tPhysica B$$v325$$y2003
000809863 999C5 $$1Sertsu$$2Crossref$$9-- missing cx lookup --$$a10.1117/12.2181821$$p95110P -$$tProc. SPIE$$v9511$$y2015
000809863 999C5 $$1Henke$$2Crossref$$9-- missing cx lookup --$$a10.1006/adnd.1993.1013$$p181 -$$tAt. Data Nucl. Data Tables$$v54$$y1993
000809863 999C5 $$1Bajt$$2Crossref$$9-- missing cx lookup --$$a10.1364/AO.42.005750$$p5750 -$$tAppl. Opt.$$v42$$y2003
000809863 999C5 $$1Bajt$$2Crossref$$9-- missing cx lookup --$$a10.1364/AO.42.005750$$p5750 -$$tAppl. Opt.$$v42$$y2003
000809863 999C5 $$1Gullikson$$2Crossref$$9-- missing cx lookup --$$a10.1364/AO.54.004280$$p4280 -$$tAppl. Opt.$$v54$$y2015
000809863 999C5 $$1Corso$$2Crossref$$9-- missing cx lookup --$$a10.1364/OE.19.013963$$p13963 -$$tOpt. Express$$v19$$y2011
000809863 999C5 $$1Fineschi$$2Crossref$$9-- missing cx lookup --$$a10.1117/12.2028544$$p88620G -$$tProc. SPIE$$v8862$$y2013
000809863 999C5 $$1Oetzel$$2Crossref$$9-- missing cx lookup --$$a10.1107/S0021889899005737$$p799 -$$tJ. Appl. Crystallogr.$$v32$$y1999
000809863 999C5 $$1Windt$$2Crossref$$9-- missing cx lookup --$$a10.1063/1.168689$$p360 -$$tComput. Phys.$$v12$$y1998
000809863 999C5 $$1Lampton$$2Crossref$$9-- missing cx lookup --$$a10.1086/154592$$p177 -$$tAstrophys. J.$$v208$$y1976
000809863 999C5 $$1Yaqoob$$2Crossref$$9-- missing cx lookup --$$a10.1086/305781$$p893 -$$tAstrophys. J.$$v500$$y1998
000809863 999C5 $$1Binda$$2Crossref$$9-- missing cx lookup --$$a10.1117/12.568104$$p97 -$$tProc. SPIE$$v5539$$y2004
000809863 999C5 $$1Ulyanenkov$$2Crossref$$9-- missing cx lookup --$$a10.1016/S0921-4526(99)01972-9$$p237 -$$tPhysica B$$v283$$y2000
000809863 999C5 $$1Serafinczuk$$2Crossref$$oSerafinczuk 2011$$y2011
000809863 999C5 $$1Lemoine$$2Crossref$$9-- missing cx lookup --$$a10.1016/j.carbon.2006.04.029$$p2617 -$$tCarbon$$v44$$y2006
000809863 999C5 $$1Nayak$$2Crossref$$oNayak 2011$$y2011
000809863 999C5 $$1Soufli$$2Crossref$$9-- missing cx lookup --$$a10.1364/AO.36.005499$$p5499 -$$tAppl. Opt.$$v36$$y1997
000809863 999C5 $$1Spiga$$2Crossref$$9-- missing cx lookup --$$a10.1117/12.672895$$p626616 -$$tProc. SPIE$$v6266$$y2006
000809863 999C5 $$1Banyay$$2Crossref$$9-- missing cx lookup --$$a10.1116/1.4718433$$p041506 -$$tJ. Vac. Sci. Technol. A$$v30$$y2012
000809863 999C5 $$1Soufli$$2Crossref$$9-- missing cx lookup --$$a10.1364/AO.37.001713$$p1713 -$$tAppl. Opt.$$v37$$y1998
000809863 999C5 $$1Windt$$2Crossref$$9-- missing cx lookup --$$a10.1116/1.587449$$p3826 -$$tJ. Vac. Sci. Technol. B$$v12$$y1994
000809863 999C5 $$1Pelizzo$$2Crossref$$9-- missing cx lookup --$$a10.1364/OE.16.015228$$p15228 -$$tOpt. Express$$v16$$y2008