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@ARTICLE{Sertsu:809863,
      author       = {Sertsu, M. G. and Nardello, M. and Giglia, A. and Corso, A.
                      J. and Maurizio, C. and Juschkin, Larissa and Nicolosi, P.},
      title        = {{A}nalysis of buried interfaces in multilayer mirrors using
                      grazing incidence extreme ultraviolet reflectometry near
                      resonance edges},
      journal      = {Applied optics},
      volume       = {54},
      number       = {35},
      issn         = {0003-6935},
      address      = {Washington, DC},
      publisher    = {Soc.77209},
      reportid     = {FZJ-2016-02789},
      pages        = {10351},
      year         = {2015},
      abstract     = {Accurate measurements of optical properties of multilayer
                      (ML) mirrors and chemical compositions of interdiffusion
                      layers are particularly challenging to date. In this work,
                      an innovative and nondestructive experimental
                      characterization method for multilayers is discussed. The
                      method is based on extreme ultraviolet (EUV) reflectivity
                      measurements performed on a wide grazing incidence angular
                      range at an energy near the absorption resonance edge of
                      low-Z elements in the ML components. This experimental
                      method combined with the underlying physical phenomenon of
                      abrupt changes of optical constants near EUV resonance edges
                      enables us to characterize optical and structural properties
                      of multilayers with high sensitivity. A major advantage of
                      the method is to perform detailed quantitative analysis of
                      buried interfaces of multilayer structures in a
                      nondestructive and nonimaging setup. Coatings of Si/Mo
                      multilayers on a Si substrate with period 𝒅=16.4  nm,
                      number of bilayers 𝑵=25, and different capping structures
                      are investigated. Stoichiometric compositions of Si-on-Mo
                      and Mo-on-Si interface diffusion layers are derived. Effects
                      of surface oxidation reactions and carbon contaminations on
                      the optical constants of capping layers and the impact of
                      neighboring atoms’ interactions on optical responses of Si
                      and Mo layers are discussed.},
      cin          = {PGI-9},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106},
      pnm          = {899 - ohne Topic (POF3-899)},
      pid          = {G:(DE-HGF)POF3-899},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000366605900010},
      doi          = {10.1364/AO.54.010351},
      url          = {https://juser.fz-juelich.de/record/809863},
}