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@ARTICLE{Kim:809864,
author = {Kim, Hyun-su and Li, W. and Danylyuk, S. and Brocklesby, W.
S. and Marconi, M. C. and Juschkin, Larissa},
title = {{O}ptical properties of 2{D} fractional {T}albot patterns
under coherent {EUV} illumination},
journal = {Journal of physics / D},
volume = {48},
number = {37},
issn = {1361-6463},
address = {Bristol},
publisher = {IOP Publ.},
reportid = {FZJ-2016-02790},
pages = {375101 -},
year = {2015},
abstract = {We investigate optical properties of (2D) fractional Talbot
patterns under illumination with EUV laser light. The
fractional Talbot effect, due to spatial frequency
multiplication, can enable patterning of micro and
nano-structures with various feature sizes using a
micro-scale pitch mask. The experiment is performed with a
free-standing mask fabricated by focused ion beam milling
and a highly coherent illumination at 46.9 nm wavelength
generated by a compact capillary discharge Ne-like Argon
laser. As a result of spatial frequency multiplication,
structure density of a square array of apertures in the mask
was increased by a factor of up to 9 at the recording plane.
The depth of field of the fractional Talbot images has been
investigated using Fresnel diffraction analysis. Added field
distribution complexity caused by asymmetry of the 2D arrays
was observed both in simulation and in the experiment. This
approach could be useful for sub-micron structuring of 2D
patterns for various applications including among others the
fabrication of photonic crystals, quantum dots, and also of
submicron-electronic devices.},
cin = {PGI-9 / JARA-FIT},
ddc = {530},
cid = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000360975100003},
doi = {10.1088/0022-3727/48/37/375101},
url = {https://juser.fz-juelich.de/record/809864},
}