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@ARTICLE{Kim:809865,
      author       = {Kim, Hyun-su and Li, Wei and Danylyuk, Serhiy and
                      Brocklesby, William S. and Marconi, Mario C. and Juschkin,
                      Larissa},
      title        = {{F}ractional {T}albot lithography with extreme ultraviolet
                      light},
      journal      = {Optics letters},
      volume       = {39},
      number       = {24},
      issn         = {1539-4794},
      address      = {Washington, DC},
      publisher    = {Soc.},
      reportid     = {FZJ-2016-02791},
      pages        = {6969-6972},
      year         = {2014},
      abstract     = {Fractional Talbot effect leads to the possibility to
                      implement patterning of structures with smaller periods than
                      the master mask. This is particularly attractive when using
                      short wavelength illumination in the extreme ultraviolet
                      because of attainable resolution in the sub-100-nm range. In
                      this Letter, we demonstrate the Talbot lithography with the
                      fractional Talbot effect under coherent illumination
                      generated with a capillary discharge Ne-like Ar extreme
                      ultraviolet laser. Various spatial frequency multiplications
                      up to 5𝑥 are achieved using a parent grating. This
                      technique allows a fabrication of nanostructures with
                      high-resolution patterns, which is of high interest in many
                      applications such as the manufacturing of plasmonic surfaces
                      and photonic devices.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000346347900052},
      pubmed       = {pmid:25503043},
      doi          = {10.1364/OL.39.006969},
      url          = {https://juser.fz-juelich.de/record/809865},
}