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@INPROCEEDINGS{Mauer:810157,
      author       = {Mauer, Georg and He, Wenting and Vassen, Robert},
      title        = {{U}nderstanding {P}lasma {S}pray-{P}hysical {V}apor
                      {D}eposition ({PS}-{PVD}): current state and challenges},
      reportid     = {FZJ-2016-03032},
      year         = {2016},
      month         = {Jul},
      date          = {2016-07-03},
      organization  = {High-Tech Plasma Processes Conference
                       14, München (Germany), 3 Jul 2016 - 7
                       Jul 2016},
      subtyp        = {Invited},
      cin          = {IEK-1},
      cid          = {I:(DE-Juel1)IEK-1-20101013},
      pnm          = {113 - Methods and Concepts for Material Development
                      (POF3-113) / HITEC - Helmholtz Interdisciplinary Doctoral
                      Training in Energy and Climate Research (HITEC)
                      (HITEC-20170406)},
      pid          = {G:(DE-HGF)POF3-113 / G:(DE-Juel1)HITEC-20170406},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/810157},
}