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@INPROCEEDINGS{Mauer:810157,
author = {Mauer, Georg and He, Wenting and Vassen, Robert},
title = {{U}nderstanding {P}lasma {S}pray-{P}hysical {V}apor
{D}eposition ({PS}-{PVD}): current state and challenges},
reportid = {FZJ-2016-03032},
year = {2016},
month = {Jul},
date = {2016-07-03},
organization = {High-Tech Plasma Processes Conference
14, München (Germany), 3 Jul 2016 - 7
Jul 2016},
subtyp = {Invited},
cin = {IEK-1},
cid = {I:(DE-Juel1)IEK-1-20101013},
pnm = {113 - Methods and Concepts for Material Development
(POF3-113) / HITEC - Helmholtz Interdisciplinary Doctoral
Training in Energy and Climate Research (HITEC)
(HITEC-20170406)},
pid = {G:(DE-HGF)POF3-113 / G:(DE-Juel1)HITEC-20170406},
typ = {PUB:(DE-HGF)6},
url = {https://juser.fz-juelich.de/record/810157},
}