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@INBOOK{Hardtdegen:810711,
      author       = {Hardtdegen, H. and Bugge, F.},
      title        = {{C}hemical {V}apor {E}pitaxy of {A}l$_{x}${G}a$_{1-x}${A}s},
      address      = {Amsterdam},
      publisher    = {Elsevier},
      reportid     = {FZJ-2016-03308},
      pages        = {1-6},
      year         = {2016},
      comment      = {$http://invenio-wiki.gsi.de/cgi-bin/view/Main/29510a#FZJ_fontReference$
                      Module in Materials Science and Materials Engineering /
                      Hardtdegen, H. ; : Elsevier, 2016, ; ISBN: 9780128035818 ;
                      doi:10.1016/B978-0-12-803581-8.02013-0},
      booktitle     = {$http://invenio-wiki.gsi.de/cgi-bin/view/Main/29510a#FZJ_fontReference$
                       Module in Materials Science and
                       Materials Engineering / Hardtdegen, H.
                       ; : Elsevier, 2016, ; ISBN:
                       9780128035818 ;
                       doi:10.1016/B978-0-12-803581-8.02013-0},
      abstract     = {A short overview about the growth chemistry of AlxGa1-xAs
                      in the MOVPE process is given. Basic knowledge is necessary
                      to understand the influence of growth parameters on GaAs and
                      AlxGa1-xAs layer characteristics. Mainly the group III to
                      group V partial pressure ratio and the growth temperature
                      determine the quality of the bulk layers deposited. The
                      optimal growth temperature window for AlxGa1-xAs is
                      different in comparison to that for GaAs. A higher growth
                      temperature is used if the AlxGa1-xAs quality is essential,
                      and a lower temperature is used when the device structure
                      requires abrupt interfaces.},
      cin          = {PGI-9},
      cid          = {I:(DE-Juel1)PGI-9-20110106},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)7},
      doi          = {10.1016/B978-0-12-803581-8.02013-0},
      url          = {https://juser.fz-juelich.de/record/810711},
}