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@ARTICLE{Rodenbcher:810832,
author = {Rodenbücher, C. and Hildebrandt, E. and Szot, K. and
Sharath, S. U. and Kurian, J. and Komissinskiy, P. and
Breuer, Uwe and Waser, R. and Alff, L.},
title = {{H}afnium carbide formation in oxygen deficient hafnium
oxide thin films},
journal = {Applied physics letters},
volume = {108},
number = {25},
issn = {1077-3118},
address = {Melville, NY},
publisher = {American Inst. of Physics},
reportid = {FZJ-2016-03415},
pages = {252903 -},
year = {2016},
abstract = {On highly oxygen deficient thin films of hafnium oxide
(hafnia, HfO2− x) contaminated with adsorbates of carbon
oxides, the formation of hafnium carbide (HfCx) at the
surface during vacuum annealing at temperatures as low as
600 °C is reported. Using X-ray photoelectron
spectroscopy the evolution of the HfCx surface layer related
to a transformation from insulating into metallic state is
monitored in situ. In contrast, for fully stoichiometric
HfO2 thin films prepared and measured under identical
conditions, the formation of HfCx was not detectable
suggesting that the enhanced adsorption of carbon oxides on
oxygen deficient films provides a carbon source for the
carbide formation. This shows that a high concentration of
oxygen vacancies in carbon contaminated hafnia lowers
considerably the formation energy of hafnium carbide. Thus,
the presence of a sufficient amount of residual carbon in
resistive random access memory devices might lead to a
similar carbide formation within the conducting filaments
due to Joule heating.},
cin = {PGI-7 / ZEA-3 / JARA-FIT},
ddc = {530},
cid = {I:(DE-Juel1)PGI-7-20110106 / I:(DE-Juel1)ZEA-3-20090406 /
$I:(DE-82)080009_20140620$},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000379039900026},
doi = {10.1063/1.4954714},
url = {https://juser.fz-juelich.de/record/810832},
}