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%0 Conference Paper %A Xie, J. %A Oudenhoven, J. F. M. %A Notten, Peter H. L. %T 3D Deposition of TiO2 Thin Film Electrodes by Chemical Vapor Deposition %M FZJ-2016-03635 %D 2015 %B MRS conference %C 29 Nov 2015 - 5 Dec 2015, Boston (USA) Y2 29 Nov 2015 - 5 Dec 2015 M2 Boston, USA %F PUB:(DE-HGF)6 %9 Conference Presentation %U https://juser.fz-juelich.de/record/811112