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@INPROCEEDINGS{Xie:811112,
      author       = {Xie, J. and Oudenhoven, J. F. M. and Notten, Peter H. L.},
      title        = {3{D} {D}eposition of {T}i{O}2 {T}hin {F}ilm {E}lectrodes by
                      {C}hemical {V}apor {D}eposition},
      reportid     = {FZJ-2016-03635},
      year         = {2015},
      month         = {Nov},
      date          = {2015-11-29},
      organization  = {MRS conference, Boston (USA), 29 Nov
                       2015 - 5 Dec 2015},
      subtyp        = {Other},
      cin          = {IEK-9},
      cid          = {I:(DE-Juel1)IEK-9-20110218},
      pnm          = {131 - Electrochemical Storage (POF3-131)},
      pid          = {G:(DE-HGF)POF3-131},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/811112},
}