%0 Conference Paper
%A Richter, Alexei
%A Lentz, Florian
%A Lambertz, Andreas
%A Meier, Matthias
%A Finger, Friedhelm
%A Ding, Kaining
%T Implementierung von nanokristallinem Siliziumoxid in Silizium-Heterostruktursolarzellen
%M FZJ-2016-03880
%D 2016
%B SiliconFOREST 2016
%C 14 Feb 2016 - 17 Feb 2016, Falkau (Germany)
Y2 14 Feb 2016 - 17 Feb 2016
M2 Falkau, Germany
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/811396