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@INPROCEEDINGS{Hardtdegen:811594,
author = {Hardtdegen, Hilde and Riess, Sally and Schuck, Martin and
ratajczak, Albert and Keller, Kristof and Jost, Christian
and Bornhöfft, Manuel and Du, Hongchu and Schwedt,
Alexander and Mayer, Joachim and Roth, Georg and Mussler,
Gregor and von der Ahe, Martina and Grützmacher, Detlev and
Mikulics, Martin},
title = {{MOVPE} and characterization of rhombohedral
{G}e1{S}b2{T}e4/{S}i(111)},
reportid = {FZJ-2016-04015},
year = {2016},
abstract = {Chalcogenide alloys in the Ge-Sb-Te system exhibit a large
contrast in their optical and electrical properties when
their phases switch from the amorphous to the meta-stable
cubic crystalline state. Up to now, they have been applied
to rewritable optical data storage media[1] such as compact
discs (CDs), digital versatile discs (DVD) and blu-ray discs
(BRD). Currently, the exploitation of their large change in
resistivity upon switching is in the focus of attention for
next generation non-volatile memories. However, a high
energy imput is required for switching and the resistance
especially of the amorphous state drifts with time[2].
Therefore, there is a growing interest in memory material
systems switching between two distinct crystalline states
avoiding the amorphous state and melting and
recrystallization processes.The so-called interfacial phase
change memory (iPCM) based on GeTe-Sb2Te3 superlattices[3]
was reported to be a suitable approach to reduce energy
consumption in data storage applications. Here, the
resistance change is reported to be evoked by a displacement
of Ge atoms at the GeTe-Sb2Te3 interfaces and the structural
changes are field induced. Only a fraction of the energy for
switching is consumed. The hexagonal superlattices are
deposited by sputter deposition or molecular beam epitaxy
and are highly textured. In this work, epitaxial Ge-Sb-Te
films crystallizing in the thermodynamically stable
rhombohedral phase have only lately been accessible.
Ge1Sb2Te4 layers were deposited by the industrially relevant
method MOVPE on Si (111) substrates[4]. The alloy is
expected to have properties similar to those of the
superlattices mentioned above. Therefore, the
characteristics of this novel material and its potential for
non-volatile memory applications is of great interest. In
this contribution, we will report shortly on the growth and
then mainly center on the structural and electrical
characteristics of this new epitaxial material.Growth was
carried out in a single wafer horizontal reactor (AIX 200,
AIXTRON) on Si (111) substrates using nitrogen as the
carrier gas[5]. Further information is given in[4]. The
samples were characterized structurally by X-ray
diffractometry, aberration corrected high-angle annular
dark-field scanning transmission electron microscopy
(HAADF-STEM), energy dispersive X-ray (EDX) spectroscopy and
electron back scatter diffraction (EBSD). The intrinsic
electrical characteristics of the material were
characterized by removing Ge1Sb2Te4 platelets from their
growth substrate and transferring them to coplanar
striplines. It was found, that Ge1Sb2Te4 grows epitaxially
and its unit cell consists of 3 seven layered blocks each of
which is separated by van der Waals gaps. Alternating anion
and cation planes as well as the gaps are found in parallel
to the Si (111) substrate surface. Resistive switching
measurements were performed without any detectable
structural deterioration. Current densities exhibit values
from 10-6 down to 10-11A/µm3 at 1V bias switching. Complete
structural and electrical characterization will be
presented.},
month = {Jul},
date = {2016-07-10},
organization = {18th International Conference on Metal
Organic Vapor Phase Epitaxy, San Diego
(USA), 10 Jul 2016 - 15 Jul 2016},
subtyp = {Other},
cin = {PGI-9},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {523 - Controlling Configuration-Based Phenomena (POF3-523)},
pid = {G:(DE-HGF)POF3-523},
typ = {PUB:(DE-HGF)6},
url = {https://juser.fz-juelich.de/record/811594},
}