000811595 001__ 811595 000811595 005__ 20210129223904.0 000811595 037__ $$aFZJ-2016-04016 000811595 1001_ $$0P:(DE-Juel1)125593$$aHardtdegen, Hilde$$b0$$eCorresponding author$$ufzj 000811595 1112_ $$aLayTec Users Meeting$$cSan Diego$$wUSA 000811595 245__ $$aImproving reproducibility in the MOVPE of Ge1Sb2Te4 000811595 260__ $$c2016 000811595 3367_ $$033$$2EndNote$$aConference Paper 000811595 3367_ $$2DataCite$$aOther 000811595 3367_ $$2BibTeX$$aINPROCEEDINGS 000811595 3367_ $$2ORCID$$aLECTURE_SPEECH 000811595 3367_ $$0PUB:(DE-HGF)31$$2PUB:(DE-HGF)$$aTalk (non-conference)$$btalk$$mtalk$$s1469450929_12095$$xInvited 000811595 3367_ $$2DINI$$aOther 000811595 536__ $$0G:(DE-HGF)POF3-523$$a523 - Controlling Configuration-Based Phenomena (POF3-523)$$cPOF3-523$$fPOF III$$x0 000811595 7001_ $$0P:(DE-Juel1)169136$$aratajczak, Albert$$b1$$ufzj 000811595 7001_ $$0P:(DE-Juel1)145470$$aSchuck, Martin$$b2$$ufzj 000811595 909CO $$ooai:juser.fz-juelich.de:811595$$pVDB 000811595 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)125593$$aForschungszentrum Jülich$$b0$$kFZJ 000811595 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)169136$$aForschungszentrum Jülich$$b1$$kFZJ 000811595 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)145470$$aForschungszentrum Jülich$$b2$$kFZJ 000811595 9131_ $$0G:(DE-HGF)POF3-523$$1G:(DE-HGF)POF3-520$$2G:(DE-HGF)POF3-500$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bKey Technologies$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Configuration-Based Phenomena$$x0 000811595 9141_ $$y2016 000811595 915__ $$0StatID:(DE-HGF)0550$$2StatID$$aNo Authors Fulltext 000811595 920__ $$lyes 000811595 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0 000811595 980__ $$atalk 000811595 980__ $$aVDB 000811595 980__ $$aUNRESTRICTED 000811595 980__ $$aI:(DE-Juel1)PGI-9-20110106