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@ARTICLE{Xie:818240,
      author       = {Xie, Jie and Oudenhoven, Jos. F. M. and Dongjiang, Li and
                      Chunguang, Chen and Eichel, Rüdiger-A. and Notten, Peter H.
                      L.},
      title        = {{H}igh {P}ower and {H}igh {C}apacity 3{D}-{S}tructured
                      {T}i{O}2 {E}lectrodes for{L}ithium-{I}on {M}icrobatteries},
      journal      = {Journal of the Electrochemical Society},
      volume       = {163},
      number       = {10},
      issn         = {0013-4651},
      address      = {Pennington, NJ},
      publisher    = {Electrochemical Soc.},
      reportid     = {FZJ-2016-04718},
      pages        = {A2385-A2389},
      year         = {2016},
      abstract     = {An on-chip compatible method to fabricate high energy
                      density TiO2 thin film electrodes on 3D-structured silicon
                      substrates was demonstrated. 3D-structured electrodes are
                      fabricated by combining reactive ion etching (RIE) with low
                      pressure chemical vapor deposition (LPCVD), enabling
                      accurate control of the aspect ratio of substrates and the
                      subsequent deposition of TiO2 thin film electrodes onto
                      these structured substrates. The prepared 3D-TiO2 electrodes
                      exhibit a current-dependent increase in storage capacity of
                      a factor up to 16 as compared to conventional planar
                      electrodes. In addition, these 3D electrodes also reveal
                      excellent power and cycling performance. This work
                      demonstrates that LPCVD is capable of depositing homogeneous
                      film electrodes on highly structured substrates and the
                      prepared 3D-electrodes also shows significant improve in
                      storage capacity and power density.},
      cin          = {IEK-9},
      ddc          = {540},
      cid          = {I:(DE-Juel1)IEK-9-20110218},
      pnm          = {131 - Electrochemical Storage (POF3-131)},
      pid          = {G:(DE-HGF)POF3-131},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000389150900037},
      doi          = {10.1149/2.1141610jes},
      url          = {https://juser.fz-juelich.de/record/818240},
}