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@MASTERSTHESIS{Hffler:819454,
author = {Höffler, Cecilia},
title = {{H}erstellung und {C}harakterisierung von
{S}ilizium-{N}ano-{R}ibbon-{F}eldeffekttransistoren},
school = {RWTH Aachen},
type = {MS},
reportid = {FZJ-2016-05118},
pages = {84 p.},
year = {2016},
note = {RWTH Aachen, Masterarbeit, 2016},
cin = {ICS-8},
cid = {I:(DE-Juel1)ICS-8-20110106},
pnm = {552 - Engineering Cell Function (POF3-552)},
pid = {G:(DE-HGF)POF3-552},
typ = {PUB:(DE-HGF)19},
url = {https://juser.fz-juelich.de/record/819454},
}