TY - THES AU - Rothe, Felix TI - NiSi/Si and Metal/Tunneling Oxide/Si Contacts PB - RWTH Aachen VL - MS M1 - FZJ-2016-06368 SP - 46p PY - 2016 N1 - RWTH Aachen, Masterarbeit, 2016 LB - PUB:(DE-HGF)19 UR - https://juser.fz-juelich.de/record/821125 ER -