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@INPROCEEDINGS{SchulteBraucks:821186,
author = {Schulte-Braucks, Christian and Glass, S. and Hofmann, E.
and Stange, D. and von den Driesch, N. and Zhao, Q. T. and
Buca, D. and Mantl, S. and Hartmann, J. M. and Ikonic, Z.},
title = {{P}rocess modules for {G}e{S}n nanoelectronics with high
{S}n-contents},
address = {[Piscataway, NJ]},
publisher = {IEEE},
reportid = {FZJ-2016-06424},
isbn = {978-1-4673-8609-8},
pages = {24-27},
year = {2016},
abstract = {In this paper we present a systematic study of GeSn n-FETs.
First, process modules such as high-k metal gate stacks and
NiGeSn - metallic contacts for use as source/drain contacts
are characterized and discussed. GeSn alloys of different Sn
content allow the study of the capacitance-voltage (CV) and
contact characteristics of both direct and indirect bandgap
semiconductors. We then present GeSn n-FET devices we have
fabricated. The device characterization includes temperature
dependent IV characteristics. As important step towards GeSn
for tunnel-FET Ge0.87Sn0.13 tunnel-diodes with negative
differential resistance at reduced temperature are shown.
The present work provides a base for further optimization of
GeSn FET and novel tunnel FET devices.},
date = {1252016},
organization = {2016 Joint International EUROSOI
Workshop and International Conference
on Ultimate Integration on Silicon
(EUROSOI-ULIS), Vienna (Austria), 5 Dec
2016 - 7 Dec 2016},
cin = {PGI-9},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
doi = {10.1109/ULIS.2016.7440043},
url = {https://juser.fz-juelich.de/record/821186},
}