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@ARTICLE{Blaeser:821189,
author = {Blaeser, Sebastian and Glass, Stefan and Schulte-Braucks,
Christian and Narimani, Keyvan and von den Driesch, Nils and
Wirths, Stephan and Tiedemann, Andreas and Trellenkamp,
Stefan and Buca, Dan Mihai and Mantl, Siegfried and Zhao,
Qing-Tai},
title = {{L}ine {T}unneling {D}ominating {C}harge {T}ransport in
{S}i{G}e/{S}i {H}eterostructure {TFET}s},
journal = {IEEE transactions on electron devices},
volume = {63},
number = {11},
issn = {1557-9646},
address = {New York, NY},
publisher = {IEEE},
reportid = {FZJ-2016-06427},
pages = {4173 - 4178},
year = {2016},
abstract = {This paper provides an experimental proof that both the
ON-current ION and the subthreshold swing SS of Si(Ge)-based
tunneling FETs (TFETs) drastically benefit from device
architectures promoting line tunneling aligned with the gate
electrical field. A novel SiGe/Si heterostructure TFET is
fabricated, making use of a selective and self-adjusted
silicidation, thus enlarging the area for
band-to-band-tunneling (BTBT) in a region directly
underneath the gate. In addition, a counter-doped pocket
within the SiGe layer at the source tunnel junction is
introduced in order to sharpen the corresponding doping
profile and, consequently, to shorten the resulting
tunneling length. Experimental analysis of activation
energies Eα identifies BTBT, dominating the drain current
Id in the SiGe/Si heterostructure TFET over a wide region of
the gate voltage Vg, thus reducing parasitic influence of
Shockley-Read-Hall recombination and trap-assisted
tunneling. Both a relatively high ION = 6.7 μA/μm at a
supply voltage VDD = 0.5 V and an average SS of about 80
mV/decade over four orders of magnitude of Id were
achieved.},
cin = {PGI-9 / PGI-8-PT},
ddc = {620},
cid = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)PGI-8-PT-20110228},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000389340400004},
doi = {10.1109/TED.2016.2608383},
url = {https://juser.fz-juelich.de/record/821189},
}