%0 Conference Paper
%A Moers, Jürgen
%A Mikulics, Martin
%A Marso, Michel
%A Trellenkamp, Stefan
%A Sofer, Zdenek
%A Grützmacher, Detlev
%A Hardtdegen, Hilde
%T Fabrication of UV sources for novel lithographical techniques: development of nano-LED etching procedures
%M FZJ-2016-06854
%D 2016
%B The 11th International Conference on Advanced Semiconductor Devices And Microsystems
%C 13 Nov 2016 - 16 Nov 2016, Smolenice (Slovakia)
Y2 13 Nov 2016 - 16 Nov 2016
M2 Smolenice, Slovakia
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/824235