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000824235 037__ $$aFZJ-2016-06854
000824235 1001_ $$0P:(DE-Juel1)128616$$aMoers, Jürgen$$b0$$ufzj
000824235 1112_ $$aThe 11th International Conference on Advanced Semiconductor Devices And Microsystems$$cSmolenice$$d2016-11-13 - 2016-11-16$$gASDAM '16$$wSlovakia
000824235 245__ $$aFabrication of UV sources for novel lithographical techniques: development of nano-LED etching procedures
000824235 260__ $$c2016
000824235 3367_ $$033$$2EndNote$$aConference Paper
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000824235 536__ $$0G:(DE-HGF)POF3-521$$a521 - Controlling Electron Charge-Based Phenomena (POF3-521)$$cPOF3-521$$fPOF III$$x0
000824235 7001_ $$0P:(DE-Juel1)128613$$aMikulics, Martin$$b1$$eCorresponding author$$ufzj
000824235 7001_ $$0P:(DE-HGF)0$$aMarso, Michel$$b2
000824235 7001_ $$0P:(DE-Juel1)128856$$aTrellenkamp, Stefan$$b3
000824235 7001_ $$0P:(DE-HGF)0$$aSofer, Zdenek$$b4
000824235 7001_ $$0P:(DE-Juel1)125588$$aGrützmacher, Detlev$$b5$$ufzj
000824235 7001_ $$0P:(DE-Juel1)125593$$aHardtdegen, Hilde$$b6$$ufzj
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000824235 9141_ $$y2016
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000824235 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0
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