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@INPROCEEDINGS{Moers:824235,
      author       = {Moers, Jürgen and Mikulics, Martin and Marso, Michel and
                      Trellenkamp, Stefan and Sofer, Zdenek and Grützmacher,
                      Detlev and Hardtdegen, Hilde},
      title        = {{F}abrication of {UV} sources for novel lithographical
                      techniques: development of nano-{LED} etching procedures},
      reportid     = {FZJ-2016-06854},
      year         = {2016},
      month         = {Nov},
      date          = {2016-11-13},
      organization  = {The 11th International Conference on
                       Advanced Semiconductor Devices And
                       Microsystems, Smolenice (Slovakia), 13
                       Nov 2016 - 16 Nov 2016},
      subtyp        = {Other},
      cin          = {PGI-9 / PGI-8-PT},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)PGI-8-PT-20110228},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/824235},
}