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| 001 | 824235 | ||
| 005 | 20210129225005.0 | ||
| 037 | _ | _ | |a FZJ-2016-06854 |
| 100 | 1 | _ | |a Moers, Jürgen |0 P:(DE-Juel1)128616 |b 0 |u fzj |
| 111 | 2 | _ | |a The 11th International Conference on Advanced Semiconductor Devices And Microsystems |g ASDAM '16 |c Smolenice |d 2016-11-13 - 2016-11-16 |w Slovakia |
| 245 | _ | _ | |a Fabrication of UV sources for novel lithographical techniques: development of nano-LED etching procedures |
| 260 | _ | _ | |c 2016 |
| 336 | 7 | _ | |a Conference Paper |0 33 |2 EndNote |
| 336 | 7 | _ | |a Other |2 DataCite |
| 336 | 7 | _ | |a INPROCEEDINGS |2 BibTeX |
| 336 | 7 | _ | |a conferenceObject |2 DRIVER |
| 336 | 7 | _ | |a LECTURE_SPEECH |2 ORCID |
| 336 | 7 | _ | |a Conference Presentation |b conf |m conf |0 PUB:(DE-HGF)6 |s 1481200506_21507 |2 PUB:(DE-HGF) |x Other |
| 536 | _ | _ | |a 521 - Controlling Electron Charge-Based Phenomena (POF3-521) |0 G:(DE-HGF)POF3-521 |c POF3-521 |f POF III |x 0 |
| 700 | 1 | _ | |a Mikulics, Martin |0 P:(DE-Juel1)128613 |b 1 |e Corresponding author |u fzj |
| 700 | 1 | _ | |a Marso, Michel |0 P:(DE-HGF)0 |b 2 |
| 700 | 1 | _ | |a Trellenkamp, Stefan |0 P:(DE-Juel1)128856 |b 3 |
| 700 | 1 | _ | |a Sofer, Zdenek |0 P:(DE-HGF)0 |b 4 |
| 700 | 1 | _ | |a Grützmacher, Detlev |0 P:(DE-Juel1)125588 |b 5 |u fzj |
| 700 | 1 | _ | |a Hardtdegen, Hilde |0 P:(DE-Juel1)125593 |b 6 |u fzj |
| 909 | C | O | |o oai:juser.fz-juelich.de:824235 |p VDB |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 0 |6 P:(DE-Juel1)128616 |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 1 |6 P:(DE-Juel1)128613 |
| 910 | 1 | _ | |a PGI-8-PT |0 I:(DE-Juel1)PGI-8-PT-20110228 |k PGI-8-PT |b 3 |6 P:(DE-Juel1)128856 |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 5 |6 P:(DE-Juel1)125588 |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 6 |6 P:(DE-Juel1)125593 |
| 913 | 1 | _ | |a DE-HGF |b Key Technologies |l Future Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT) |1 G:(DE-HGF)POF3-520 |0 G:(DE-HGF)POF3-521 |2 G:(DE-HGF)POF3-500 |v Controlling Electron Charge-Based Phenomena |x 0 |4 G:(DE-HGF)POF |3 G:(DE-HGF)POF3 |
| 914 | 1 | _ | |y 2016 |
| 915 | _ | _ | |a No Authors Fulltext |0 StatID:(DE-HGF)0550 |2 StatID |
| 920 | _ | _ | |l yes |
| 920 | 1 | _ | |0 I:(DE-Juel1)PGI-9-20110106 |k PGI-9 |l Halbleiter-Nanoelektronik |x 0 |
| 920 | 1 | _ | |0 I:(DE-Juel1)PGI-8-PT-20110228 |k PGI-8-PT |l PGI-8-PT |x 1 |
| 980 | _ | _ | |a conf |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a UNRESTRICTED |
| 980 | _ | _ | |a I:(DE-Juel1)PGI-9-20110106 |
| 980 | _ | _ | |a I:(DE-Juel1)PGI-8-PT-20110228 |
| 981 | _ | _ | |a I:(DE-Juel1)PGI-8-PT-20110228 |
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