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%0 Conference Paper %A Lobe, Sandra %A Dellen, Christian %A Finsterbusch, Martin %A Gehrke, Hans-Gregor %A Tsai, Chih-Long %A Uhlenbruck, Sven %A Guillon, Olivier %T Sputter Deposition of Li7La3Zr2O12 for all-solid-state thin film batteries %M FZJ-2017-00006 %D 2016 %B SVC TechCon %C 10 May 2016 - 13 May 2016, Indianapolis (USA) Y2 10 May 2016 - 13 May 2016 M2 Indianapolis, USA %F PUB:(DE-HGF)6 %9 Conference Presentation %U https://juser.fz-juelich.de/record/825678