%0 Conference Paper
%A Lobe, Sandra
%A Dellen, Christian
%A Finsterbusch, Martin
%A Gehrke, Hans-Gregor
%A Tsai, Chih-Long
%A Uhlenbruck, Sven
%A Guillon, Olivier
%T Sputter Deposition of Li7La3Zr2O12 for all-solid-state thin film batteries
%M FZJ-2017-00006
%D 2016
%B SVC TechCon
%C 10 May 2016 - 13 May 2016, Indianapolis (USA)
Y2 10 May 2016 - 13 May 2016
M2 Indianapolis, USA
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/825678