TY  - CONF
AU  - Lobe, Sandra
AU  - Dellen, Christian
AU  - Finsterbusch, Martin
AU  - Gehrke, Hans-Gregor
AU  - Tsai, Chih-Long
AU  - Uhlenbruck, Sven
AU  - Guillon, Olivier
TI  - Sputter Deposition of Li7La3Zr2O12 for all-solid-state thin film batteries
M1  - FZJ-2017-00006
PY  - 2016
T2  - SVC TechCon
CY  - 10 May 2016 - 13 May 2016, Indianapolis (USA)
Y2  - 10 May 2016 - 13 May 2016
M2  - Indianapolis, USA
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/825678
ER  -