TY - JOUR
AU - Taoka, Noriyuki
AU - Capellini, Giovanni
AU - von den Driesch, Nils
AU - Buca, Dan Mihai
AU - Zaumseil, Peter
AU - Schubert, Markus Andreas
AU - Klesse, Wolfgang Matthias
AU - Montanari, Michele
AU - Schroeder, Thomas
TI - Sn migration control at high temperature due to high deposition speed for forming high-quality GeSn layer
JO - Applied physics express
VL - 9
IS - 3
SN - 1882-0786
CY - Tokyo
M1 - FZJ-2017-00163
SP - 031201
PY - 2016
AB - A key factor for controlling Sn migration during GeSn deposition at a high temperature of 400 °C was investigated. Calculated results with a simple model for the Sn migration and experimental results clarified that low-deposition-speed (vd) deposition with vd's of 0.68 and 2.8 nm/min induces significant Sn precipitation, whereas high-deposition-speed (vd = 13 nm/min) deposition leads to high crystallinity and good photoluminescence spectrum of the GeSn layer. These results indicate that vd is a key parameter, and that control of Sn migration at a high temperature is possible. These results are of great relevance for the application of high-quality Sn-based alloys in future optoelectronics devices.
LB - PUB:(DE-HGF)16
UR - <Go to ISI:>//WOS:000371302600004
DO - DOI:10.7567/APEX.9.031201
UR - https://juser.fz-juelich.de/record/825881
ER -