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000825950 1001_ $$0P:(DE-Juel1)159559$$aKireev, D.$$b0$$ufzj
000825950 245__ $$aHigh throughput transfer technique: Save your graphene
000825950 260__ $$aAmsterdam [u.a.]$$bElsevier Science$$c2016
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000825950 520__ $$aThe development rate of graphene-related research is tremendous. New methods of graphene growth and transfer are reported on a regular basis, trending towards large-scale. Nevertheless, the fabrication of high-yield and low-cost graphene devices is still challenging. In this work, we approach this problem from a technological point of view and propose a new, so-called “high-throughput transfer technique”. The technique allows a semi-automatic transfer of graphene films right at the desired places on a wafer. We demonstrate the applicability of our method by aligning 52 graphene devices on a 4-inch wafer using only 4 cm2 of graphene. The overall yield of this process is over 90%.
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000825950 7001_ $$0P:(DE-Juel1)166454$$aSarik, Dario$$b1
000825950 7001_ $$0P:(DE-HGF)0$$aWu, T.$$b2
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000825950 7001_ $$0P:(DE-Juel1)128745$$aWolfrum, B.$$b4$$ufzj
000825950 7001_ $$0P:(DE-Juel1)128713$$aOffenhäusser, A.$$b5$$eCorresponding author
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