TY  - JOUR
AU  - Kireev, D.
AU  - Sarik, Dario
AU  - Wu, T.
AU  - Xie, X.
AU  - Wolfrum, B.
AU  - Offenhäusser, A.
TI  - High throughput transfer technique: Save your graphene
JO  - Carbon
VL  - 107
SN  - 0008-6223
CY  - Amsterdam [u.a.]
PB  - Elsevier Science
M1  - FZJ-2017-00222
SP  - 319 - 324
PY  - 2016
AB  - The development rate of graphene-related research is tremendous. New methods of graphene growth and transfer are reported on a regular basis, trending towards large-scale. Nevertheless, the fabrication of high-yield and low-cost graphene devices is still challenging. In this work, we approach this problem from a technological point of view and propose a new, so-called “high-throughput transfer technique”. The technique allows a semi-automatic transfer of graphene films right at the desired places on a wafer. We demonstrate the applicability of our method by aligning 52 graphene devices on a 4-inch wafer using only 4 cm2 of graphene. The overall yield of this process is over 90%.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000380803600038
DO  - DOI:10.1016/j.carbon.2016.05.058
UR  - https://juser.fz-juelich.de/record/825950
ER  -