000825967 001__ 825967
000825967 005__ 20210129225502.0
000825967 0247_ $$2doi$$a10.1063/1.4964122
000825967 0247_ $$2ISSN$$a0003-6951
000825967 0247_ $$2ISSN$$a1077-3118
000825967 0247_ $$2WOS$$aWOS:000386152800065
000825967 0247_ $$2Handle$$a2128/17276
000825967 0247_ $$2altmetric$$aaltmetric:9803347
000825967 037__ $$aFZJ-2017-00239
000825967 082__ $$a530
000825967 1001_ $$0P:(DE-HGF)0$$aVerbiest, G. J.$$b0$$eCorresponding author
000825967 245__ $$aTunable mechanical coupling between driven microelectromechanical resonators
000825967 260__ $$aMelville, NY$$bAmerican Inst. of Physics$$c2016
000825967 3367_ $$2DRIVER$$aarticle
000825967 3367_ $$2DataCite$$aOutput Types/Journal article
000825967 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1484209511_29821
000825967 3367_ $$2BibTeX$$aARTICLE
000825967 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000825967 3367_ $$00$$2EndNote$$aJournal Article
000825967 520__ $$aWe present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (∼1.5 MHz) is tunable with the comb-drive actuator (+10%) as well as with a side-gate (−10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to either of them and changes only by ±0.5%. Finally, we show that the comb-drive actuator can be used to switch between different coupling rates with a frequency of at least 10 kHz.
000825967 536__ $$0G:(DE-HGF)POF3-521$$a521 - Controlling Electron Charge-Based Phenomena (POF3-521)$$cPOF3-521$$fPOF III$$x0
000825967 588__ $$aDataset connected to CrossRef
000825967 7001_ $$0P:(DE-HGF)0$$aXu, D.$$b1
000825967 7001_ $$0P:(DE-Juel1)165946$$aGoldsche, M.$$b2
000825967 7001_ $$0P:(DE-HGF)0$$aKhodkov, T.$$b3
000825967 7001_ $$0P:(DE-HGF)0$$aBarzanjeh, S.$$b4
000825967 7001_ $$0P:(DE-Juel1)161247$$avon den Driesch, N.$$b5
000825967 7001_ $$0P:(DE-Juel1)125569$$aBuca, D.$$b6
000825967 7001_ $$0P:(DE-HGF)0$$aStampfer, C.$$b7
000825967 773__ $$0PERI:(DE-600)1469436-0$$a10.1063/1.4964122$$gVol. 109, no. 14, p. 143507 -$$n14$$p143507$$tApplied physics letters$$v109$$x0003-6951$$y2016
000825967 8564_ $$uhttps://juser.fz-juelich.de/record/825967/files/1.4964122-1.pdf$$yOpenAccess
000825967 8564_ $$uhttps://juser.fz-juelich.de/record/825967/files/1.4964122-1.gif?subformat=icon$$xicon$$yOpenAccess
000825967 8564_ $$uhttps://juser.fz-juelich.de/record/825967/files/1.4964122-1.jpg?subformat=icon-180$$xicon-180$$yOpenAccess
000825967 8564_ $$uhttps://juser.fz-juelich.de/record/825967/files/1.4964122-1.jpg?subformat=icon-700$$xicon-700$$yOpenAccess
000825967 8564_ $$uhttps://juser.fz-juelich.de/record/825967/files/1.4964122-1.pdf?subformat=pdfa$$xpdfa$$yOpenAccess
000825967 909CO $$ooai:juser.fz-juelich.de:825967$$pdnbdelivery$$pdriver$$pVDB$$popen_access$$popenaire
000825967 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS
000825967 915__ $$0StatID:(DE-HGF)0600$$2StatID$$aDBCoverage$$bEbsco Academic Search
000825967 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bAPPL PHYS LETT : 2015
000825967 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection
000825967 915__ $$0StatID:(DE-HGF)0110$$2StatID$$aWoS$$bScience Citation Index
000825967 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded
000825967 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5
000825967 915__ $$0StatID:(DE-HGF)0510$$2StatID$$aOpenAccess
000825967 915__ $$0StatID:(DE-HGF)0030$$2StatID$$aPeer Review$$bASC
000825967 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences
000825967 915__ $$0StatID:(DE-HGF)0420$$2StatID$$aNationallizenz
000825967 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline
000825967 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bThomson Reuters Master Journal List
000825967 9141_ $$y2016
000825967 9101_ $$0I:(DE-588b)36225-6$$60000-0002-1712-1234$$aRWTH Aachen$$b0$$kRWTH
000825967 9101_ $$0I:(DE-588b)36225-6$$6P:(DE-Juel1)145185$$aRWTH Aachen$$b1$$kRWTH
000825967 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)165946$$aForschungszentrum Jülich$$b2$$kFZJ
000825967 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-HGF)0$$aForschungszentrum Jülich$$b3$$kFZJ
000825967 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)161247$$aForschungszentrum Jülich$$b5$$kFZJ
000825967 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)125569$$aForschungszentrum Jülich$$b6$$kFZJ
000825967 9101_ $$0I:(DE-588b)36225-6$$60000-0002-4958-7362$$aRWTH Aachen$$b7$$kRWTH
000825967 9101_ $$0I:(DE-588b)5008462-8$$60000-0002-4958-7362$$aForschungszentrum Jülich$$b7$$kFZJ
000825967 9131_ $$0G:(DE-HGF)POF3-521$$1G:(DE-HGF)POF3-520$$2G:(DE-HGF)POF3-500$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bKey Technologies$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Electron Charge-Based Phenomena$$x0
000825967 920__ $$lyes
000825967 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0
000825967 9201_ $$0I:(DE-82)080009_20140620$$kJARA-FIT$$lJARA-FIT$$x1
000825967 9201_ $$0I:(DE-Juel1)PGI-8-20110106$$kPGI-8$$lBioelektronik$$x2
000825967 980__ $$ajournal
000825967 980__ $$aVDB
000825967 980__ $$aUNRESTRICTED
000825967 980__ $$aI:(DE-Juel1)PGI-9-20110106
000825967 980__ $$aI:(DE-82)080009_20140620
000825967 980__ $$aI:(DE-Juel1)PGI-8-20110106
000825967 9801_ $$aFullTexts