TY  - JOUR
AU  - Verbiest, G. J.
AU  - Xu, D.
AU  - Goldsche, M.
AU  - Khodkov, T.
AU  - Barzanjeh, S.
AU  - von den Driesch, N.
AU  - Buca, D.
AU  - Stampfer, C.
TI  - Tunable mechanical coupling between driven microelectromechanical resonators
JO  - Applied physics letters
VL  - 109
IS  - 14
SN  - 0003-6951
CY  - Melville, NY
PB  - American Inst. of Physics
M1  - FZJ-2017-00239
SP  - 143507
PY  - 2016
AB  - We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (∼1.5 MHz) is tunable with the comb-drive actuator (+10%) as well as with a side-gate (−10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to either of them and changes only by ±0.5%. Finally, we show that the comb-drive actuator can be used to switch between different coupling rates with a frequency of at least 10 kHz.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000386152800065
DO  - DOI:10.1063/1.4964122
UR  - https://juser.fz-juelich.de/record/825967
ER  -