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@ARTICLE{Verbiest:825967,
      author       = {Verbiest, G. J. and Xu, D. and Goldsche, M. and Khodkov, T.
                      and Barzanjeh, S. and von den Driesch, N. and Buca, D. and
                      Stampfer, C.},
      title        = {{T}unable mechanical coupling between driven
                      microelectromechanical resonators},
      journal      = {Applied physics letters},
      volume       = {109},
      number       = {14},
      issn         = {0003-6951},
      address      = {Melville, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {FZJ-2017-00239},
      pages        = {143507},
      year         = {2016},
      abstract     = {We present a microelectromechanical system, in which a
                      silicon beam is attached to a comb-drive actuator, which is
                      used to tune the tension in the silicon beam and thus its
                      resonance frequency. By measuring the resonance frequencies
                      of the system, we show that the comb-drive actuator and the
                      silicon beam behave as two strongly coupled resonators.
                      Interestingly, the effective coupling rate (∼1.5 MHz) is
                      tunable with the comb-drive actuator $(+10\%)$ as well as
                      with a side-gate $(−10\%)$ placed close to the silicon
                      beam. In contrast, the effective spring constant of the
                      system is insensitive to either of them and changes only by
                      $±0.5\%.$ Finally, we show that the comb-drive actuator can
                      be used to switch between different coupling rates with a
                      frequency of at least 10 kHz.},
      cin          = {PGI-9 / JARA-FIT / PGI-8},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$ /
                      I:(DE-Juel1)PGI-8-20110106},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000386152800065},
      doi          = {10.1063/1.4964122},
      url          = {https://juser.fz-juelich.de/record/825967},
}