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@ARTICLE{Fleck:826322,
author = {Fleck, K. and Aslam, N. and Hoffmann-Eifert, S. and Longo,
V. and Roozeboom, F. and Kessels, W. M. M. and Böttger, U.
and Waser, R. and Menzel, S.},
title = {{T}he influence of non-stoichiometry on the switching
kinetics of strontium-titanate {R}e{RAM} devices},
journal = {Journal of applied physics},
volume = {120},
number = {24},
issn = {1089-7550},
address = {Melville, NY},
publisher = {American Inst. of Physics},
reportid = {FZJ-2017-00555},
pages = {244502 -},
year = {2016},
abstract = {Compared to conventional NAND flash resistive switching
metal-oxide cells show a number of advantages, like an
increased endurance, lower energy consumption, and superior
switching speed. Understanding the role of defects for the
resistive switching phenomenon in metal oxides is crucial
for their improvement and thereby also for their acceptance
as a next generation data storage device. Strontium titanate
(STO) is considered a model material due to its thoroughly
investigated defect chemistry. This paper presents a
comparative study of the switching kinetics for three
different compositions [Sr]/([Sr]+[Ti]) of 0.57 (Sr-rich),
0.50 (stoichiometric STO), and 0.46 (Ti-rich STO). The STO
films, deposited by atomic layer deposition, were integrated
in Pt/STO/TiN nanocrossbars with a feature size of 100 nm.
By analysis of the transient currents, the switching
kinetics are investigated between 10 ns and 104 s for
the SET and 10 ns and 100 s for the RESET. A clear
influence of the composition on the degree of nonlinearity
of the switching kinetics was observed. Applying an
analytical model for the oxygen vacancy migration, we were
able to explain the differences in the SET kinetics by
composition-dependent changes in the thermal conductivity
and by a lower activation energy for the Ti-rich sample.
This might be utilized in design rules of future ReRAM
devices.I. INTRODUCTION},
cin = {PGI-7 / JARA-FIT},
ddc = {530},
cid = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000392174000014},
doi = {10.1063/1.4972833},
url = {https://juser.fz-juelich.de/record/826322},
}