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%0 Conference Paper %A Zhang, Hehe %A Hoffmann-Eifert, Susanne %A Waser, R. %T ReRAM performance of metal/TiOx/Al2O3/metal nano crosspoint structures with oxides grownn byy atomic layer deposition %M FZJ-2017-00574 %D 2016 %B CIMTEC 2016 %C 5 Jun 2016 - 10 Jun 2016, Perugia (Italy) Y2 5 Jun 2016 - 10 Jun 2016 M2 Perugia, Italy %F PUB:(DE-HGF)6 %9 Conference Presentation %U https://juser.fz-juelich.de/record/826346