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@ARTICLE{Hensling:826396,
author = {Hensling, Felix and Xu, Chencheng and Gunkel, Felix and
Dittmann, Regina},
title = {{U}nraveling the enhanced {O}xygen {V}acancy {F}ormation in
{C}omplex {O}xides during {A}nnealing and {G}rowth},
journal = {Scientific reports},
volume = {7},
issn = {2045-2322},
address = {London},
publisher = {Nature Publishing Group},
reportid = {FZJ-2017-00624},
pages = {39953 -},
year = {2017},
abstract = {The reduction of oxides during annealing and growth in low
pressure processes is a widely known problem. We hence
investigate the influence of mere annealing and of growth in
vacuum systems to shed light on the reasons behind the
reduction of perovskites. When comparing the existing
literature regarding the reduction of the perovskite model
material SrTiO3 it is conspicuous that one finds different
oxygen pressures required to achieve reduction for vacuum
annealing and for chemically controlled reducing
atmospheres. The unraveling of this discrepancy is of high
interest for low pressure physical vapor depositions of thin
films heterostructures to gain further understanding of the
reduction of the SrTiO3. For thermal annealing, our results
prove the attached measurement devices (mass spectrometer/
cold cathode gauge) to be primarily responsible for the
reduction of SrTiO3 in the deposition chamber by shifting
the thermodynamic equilibrium to a more reducing atmosphere.
We investigated the impact of our findings on the pulsed
laser deposition growth at low pressure for LaAlO3/SrTiO3.
During deposition the reduction triggered by the presence of
the laser plume dominates and the impact of the measurement
devices plays a minor role. During post annealing a complete
reoxidization of samples is inhibited by an insufficient
supply of oxygen.},
cin = {PGI-7},
ddc = {000},
cid = {I:(DE-Juel1)PGI-7-20110106},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000392097400001},
doi = {10.1038/srep39953},
url = {https://juser.fz-juelich.de/record/826396},
}