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Verfahren und Vorrichtungen zur Modulation eines Strahls elektrisch geladener Teilchen sowie Anwendungsbeispiele für die praktische Anwendung solcher Vorrichtungen

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2016

Patent No.: 102015116788; 20161201


Contributing Institute(s):
  1. Physik Nanoskaliger Systeme (ER-C-1)
  2. Mikrostrukturforschung (PGI-5)
Research Program(s):
  1. 143 - Controlling Configuration-Based Phenomena (POF3-143) (POF3-143)

Appears in the scientific report 2016
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The record appears in these collections:
Institute Collections > ER-C > ER-C-1
Institute Collections > PGI > PGI-5
Document types > Patents > Patents
Workflow collections > Public records
Publications database

 Record created 2017-01-25, last modified 2024-06-10



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