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@INPROCEEDINGS{Kovcs:827178,
author = {Kovács, András and Duchamp, Martial and Predan, Felix and
Dimroth, Frank and Dunin-Borkowski, Rafal and Jäger,
Wolfgang},
title = {{A}tomic resolution {HR}({S}){TEM} and {EDXS} analyses of
{G}a{I}n{A}s/{G}a{S}b and {G}a{I}n{P}/{G}a{S}b bond
interfaces for high-efficiency solar cells},
address = {Weinheim, Germany},
publisher = {Wiley-VCH Verlag GmbH $\&$ Co. KGaA},
reportid = {FZJ-2017-01376},
pages = {846 - 847},
year = {2016},
comment = {European Microscopy Congress 2016: Proceedings},
booktitle = {European Microscopy Congress 2016:
Proceedings},
abstract = {The use of direct wafer bonding to combine semiconductor
materials that have a large lattice mismatch is especially
beneficial for high efficiency multi-junction solar cells.
Multi-junction solar cells that have been fabricated by
wafer bonding are of particular interest since efficiencies
of up to $46\%$ have been obtained [1] and efficiencies of
up to $50\%$ are within reach for concentrator solar cells
based on III-V compound semiconductors. Fast atom beam
activation is used as a pre-treatment to remove oxides and
contamination before bonding [2]. Aberration-corrected
transmission electron microsocpy (TEM) analyses of GaAs/Si
interfaces have previously been applied successfully to
support the implementation of bonding concepts for the
development of high-efficiency solar cells [3].Here, we
investigate cross-sectional specimens of GaInAs/GaSb and
GaInP/GaSb bond interfaces in wafer-bonded multi-junction
solar cells, in order to obtain an improved understanding of
their interface structures and thermal stability, by
combining aberration-corrected high-resolution TEM (HRTEM),
high-angle annular dark-field scanning TEM (HAADF STEM),
energy-dispersive X-ray spectroscopy (EDXS) in the STEM and
in situ TEM heating experiments.Figures 1a-e shows results
obtained from the GaInP/GaSb bond interface. Fig.1a shows
the interface at low magnification. Figure 1b shows an HRTEM
image, which reveals an amorphous interface layer (~1 nm
thick). Figure 1c shows an atomic resolution HAADF STEM
image of the bond interface structure and a digital
diffractogram (inset), revealing a nearly perfect structural
orientation relationship between the two crystalline layers.
When correctly positioned with respect to the HAADF image,
elemental maps extracted from EDXS spectrum images (Figs 1d
and 1e) reveal that a high level of Ga is present at the
interface. The Ga can be attributed to the pre-treatment
procedure and bonding conditions.I situ thermal treatment of
this interface results in pronounced interdiffusion for
temperatures above 225°C (not shown here).Figures 2a-c show
the GaInAs/GaSb bond interface, which is decorated by pores
and cavities that extend along the interface by more than 10
nm. As a result of the use of misoriented wafers for
bonding, the crystal lattices are rotated with respect to
each other by a few degrees (Figs 2b and 2c).Our results
confirm that the advanced imaging and spectroscopic methods
of aberration-corrected (S)TEM are advantageous for
characterizing the morphology, elemental distribution and
structure of layers and bond interfaces for the monitoring,
control and optimization of different concepts used for
fabricating high-efficiency solar cells. Out results are
also of interest for assessing electrical conductivity
phenomena at these interfaces.},
month = {Aug},
date = {2016-08-28},
organization = {16th European Microscopy Congress,
Lyon (France), 28 Aug 2016 - 2 Sep
2016},
cin = {PGI-5 / ER-C-1},
cid = {I:(DE-Juel1)PGI-5-20110106 / I:(DE-Juel1)ER-C-1-20170209},
pnm = {143 - Controlling Configuration-Based Phenomena (POF3-143)},
pid = {G:(DE-HGF)POF3-143},
typ = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
doi = {10.1002/9783527808465.EMC2016.6029},
url = {https://juser.fz-juelich.de/record/827178},
}