000827190 001__ 827190 000827190 005__ 20240610120543.0 000827190 0247_ $$2doi$$a10.1002/9783527808465.EMC2016.6338 000827190 037__ $$aFZJ-2017-01388 000827190 041__ $$aEnglish 000827190 1001_ $$0P:(DE-HGF)0$$aPecz, Bela$$b0$$eCorresponding author 000827190 1112_ $$a16th European Microscopy Congress (EMC 2016)$$cLyon$$d2016-08-28 - 2016-09-02$$wFrance 000827190 245__ $$aNitride layers grown on patterned graphene/SiC 000827190 260__ $$aWeinheim, Germany$$bWiley-VCH Verlag GmbH & Co. KGaA$$c2016 000827190 29510 $$aEuropean Microscopy Congress 2016: Proceedings 000827190 300__ $$a630 - 631 000827190 3367_ $$2ORCID$$aCONFERENCE_PAPER 000827190 3367_ $$033$$2EndNote$$aConference Paper 000827190 3367_ $$2BibTeX$$aINPROCEEDINGS 000827190 3367_ $$2DRIVER$$aconferenceObject 000827190 3367_ $$2DataCite$$aOutput Types/Conference Paper 000827190 3367_ $$0PUB:(DE-HGF)8$$2PUB:(DE-HGF)$$aContribution to a conference proceedings$$bcontrib$$mcontrib$$s1485875398_18212 000827190 3367_ $$0PUB:(DE-HGF)7$$2PUB:(DE-HGF)$$aContribution to a book$$mcontb 000827190 520__ $$aSelf-heating of high power GaN devices during their operation is a major drawback that limits the performance. Integration of sheets with very high thermal conductivity material could help in this matter. After some unsuccessful GaN growth experiments carried out directly on graphene, we succeeded to grow nitride layers on patterned graphene/6H-SiC by Metalorganic Chemical Vapour Deposition (MOCVD). The growth is similar to the well-known Epitaxial Lateral Overgrowth method in which the graphene buried stripes are overgrown laterally from the window regions, where AlN could grow on bare SiC with epitaxy. An AlN buffer layer was first deposited on patterned graphene/6H-SiC surface followed by a deposition of ~ 300 nm thick Al0.2Ga0.8N and ~ 1.5 µm thick GaN layer. The AlN buffer deposited onto the graphene stripe was grown in a 3D way (Fig.1a). The heterostructure was studied using aberration-corrected transmission electron microscopy (TEM) methods in combination of electron energy-loss X-ray spectroscopy (EDXS) and electron energy-loss spectroscopy (EELS). TEM specimens were prepared using both conventional and focused ion beam methods.The most surprising details of this study is the appearance of the AlN/GaN superlattices, which were formed in a self-organised way over the buffer layer. Instead the ternary AlGaN we have superlattice (Fig. 1.b and c) in which the thickness of the AlN/GaN is determined by the available elements from the Al0.2Ga0.8N which we wanted to grow. The control sample (without graphene) showed a much more flat AlN buffer and a ternary Al0.2Ga0.8N on that without any phase separation. EDXS mapping and also superlattice reflections show however, clearly the complete phase separation in the case the nitride layers are grown on graphene. We suppose, that some excess carbon induced the phase separation.The detailed TEM studies revealed the AlN nucleation directly on SiC and lateral overgrowth of graphene island as shown in Fig.2a. The high resolution image in Fig.2.b shows three layers of graphene and the AlN that is in epitaxy with SiC. Both interfaces are sharp and no interdiffusion of the elements are observed according to the Si, C (not shown) and Al maps in Fig. 2c The results show that high quality GaN layer over graphene/SiC can be grown with MOCVD that can serve as templates for high power GaN devices. 000827190 536__ $$0G:(DE-HGF)POF3-143$$a143 - Controlling Configuration-Based Phenomena (POF3-143)$$cPOF3-143$$fPOF III$$x0 000827190 588__ $$aDataset connected to CrossRef Book 000827190 7001_ $$0P:(DE-Juel1)144926$$aKovacs, Andras$$b1 000827190 7001_ $$0P:(DE-Juel1)144121$$aDunin-Borkowski, Rafal$$b2 000827190 7001_ $$0P:(DE-HGF)0$$aYakimova, Rositza$$b3 000827190 7001_ $$0P:(DE-HGF)0$$aHeuken, Michael$$b4 000827190 773__ $$a10.1002/9783527808465.EMC2016.6338 000827190 8564_ $$uhttps://juser.fz-juelich.de/record/827190/files/emc20166338.pdf$$yRestricted 000827190 8564_ $$uhttps://juser.fz-juelich.de/record/827190/files/emc20166338.gif?subformat=icon$$xicon$$yRestricted 000827190 8564_ $$uhttps://juser.fz-juelich.de/record/827190/files/emc20166338.jpg?subformat=icon-1440$$xicon-1440$$yRestricted 000827190 8564_ $$uhttps://juser.fz-juelich.de/record/827190/files/emc20166338.jpg?subformat=icon-180$$xicon-180$$yRestricted 000827190 8564_ $$uhttps://juser.fz-juelich.de/record/827190/files/emc20166338.jpg?subformat=icon-640$$xicon-640$$yRestricted 000827190 8564_ $$uhttps://juser.fz-juelich.de/record/827190/files/emc20166338.pdf?subformat=pdfa$$xpdfa$$yRestricted 000827190 909CO $$ooai:juser.fz-juelich.de:827190$$pVDB 000827190 9141_ $$y2016 000827190 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)144926$$aForschungszentrum Jülich$$b1$$kFZJ 000827190 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)144121$$aForschungszentrum Jülich$$b2$$kFZJ 000827190 9131_ $$0G:(DE-HGF)POF3-143$$1G:(DE-HGF)POF3-140$$2G:(DE-HGF)POF3-100$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bEnergie$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Configuration-Based Phenomena$$x0 000827190 920__ $$lyes 000827190 9201_ $$0I:(DE-Juel1)PGI-5-20110106$$kPGI-5$$lMikrostrukturforschung$$x0 000827190 9201_ $$0I:(DE-Juel1)ER-C-1-20170209$$kER-C-1$$lPhysik Nanoskaliger Systeme$$x1 000827190 980__ $$acontrib 000827190 980__ $$aVDB 000827190 980__ $$acontb 000827190 980__ $$aI:(DE-Juel1)PGI-5-20110106 000827190 980__ $$aI:(DE-Juel1)ER-C-1-20170209 000827190 980__ $$aUNRESTRICTED 000827190 981__ $$aI:(DE-Juel1)ER-C-1-20170209