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@ARTICLE{Goux:827316,
      author       = {Goux, Ludovic and Valov, Ilia},
      title        = {{E}lectrochemical processes and device improvement in
                      conductive bridge {RAM} cells},
      journal      = {Physica status solidi / A},
      volume       = {213},
      number       = {2},
      issn         = {1862-6300},
      address      = {Weinheim},
      publisher    = {Wiley-VCH},
      reportid     = {FZJ-2017-01487},
      pages        = {274 - 288},
      year         = {2016},
      abstract     = {In this paper, we discuss the recent progress on the
                      fundamental understandings of ECM/CBRAM cells but also on
                      the improved device structures and reliability for
                      high-density applications. The influences of the local
                      chemical environment and the material selection/combination
                      are highlighted, and the filament dynamics is described in a
                      general framework that relates all the reported switching
                      modes. Furthermore we also detail some correlation evidences
                      between the filament shape and device electrical
                      characteristics. Finally, we discuss technological
                      challenges related to current-scaling and cell size-scaling.
                      Large switching variability associated to low current needs
                      to be mitigated by appropriate Write-verify methods, while
                      cell scaling requires novel processing techniques such as Cu
                      dry-etch.},
      cin          = {PGI-7},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-7-20110106},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000370188700008},
      doi          = {10.1002/pssa.201532813},
      url          = {https://juser.fz-juelich.de/record/827316},
}