TY - JOUR
AU - Mikulics, Martin
AU - Kordoš, P.
AU - Fox, A.
AU - Kočan, M.
AU - Lüth, H.
AU - Sofer, Z.
AU - Hardtdegen, H.
TI - Efficient heat dissipation in AlGaN/GaN heterostructure grown on silver substrate
JO - Applied materials today
VL - 7
SN - 2352-9407
CY - Amsterdam [u.a.]
PB - Elsevier
M1 - FZJ-2017-02120
SP - 134 - 137
PY - 2017
AB - In this paper, we present the investigation of AlGaN/GaN heterostructures deposited on metallic/silversubstrates by a novel “combined” two-step epitaxial procedure based on metalorganic vapor phase epi-taxy (MOVPE) and molecular beam epitaxy (MBE). The channel temperature was determined by highlateral and spectral resolution Raman spectroscopy. The characteristics of the structures were comparedto those of conventional AlGaN/GaN layers deposited on sapphire. An improved heat dissipation in themetal substrate based HFETs leads to a significant decrease in channel temperature (−60% at 7 W/mm)and affects the long-term stability of the drain current (±2%) favorably in the whole range under inves-tigation (up to ∼1000 h). Metallic substrates are a viable solution toward highly reliable high-powerdevices and are beneficial to low power electronics as well, where the high integration density also callsfor efficient heat dissipation.
LB - PUB:(DE-HGF)16
UR - <Go to ISI:>//WOS:000405594100013
DO - DOI:10.1016/j.apmt.2017.02.008
UR - https://juser.fz-juelich.de/record/828150
ER -