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@PHDTHESIS{Dyck:828398,
      author       = {Dyck, Tobias},
      title        = {{L}ight {T}rapping by {L}ight {T}reatment - {D}irect
                      {L}aser {I}nterference {P}atterning for the{T}exturing of
                      {F}ront {C}ontacts in {T}hin-{F}ilm {S}ilicon {S}olar
                      {C}ells},
      volume       = {359},
      school       = {RWTH Aachen},
      type         = {Dr.},
      address      = {Jülich},
      publisher    = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
      reportid     = {FZJ-2017-02359},
      isbn         = {978-3-95806-208-5},
      series       = {Schriften des Forschungszentrums Jülich Reihe Energie $\&$
                      Umwelt / Energy $\&$ Environment},
      pages        = {vi, 172, XI S.},
      year         = {2017},
      note         = {RWTH Aachen, Diss., 2017},
      abstract     = {To further increase the energy conversion efficiency of
                      thin-film silicon solar cells, the minimization of
                      reflection losses by effective light trapping is essential.
                      Light trapping is achieved by introducing textured surfaces
                      in the layer stack of a solar cell. The incoming light is
                      scattered at the textured interfaces, the light paths within
                      the absorber layer are enhanced and the chance of absorption
                      rises. This work aims to develop an industrial feasible
                      laser-based process for the texturing of the aluminium-doped
                      zinc oxide (ZnO:Al) layer used as front contact in solar
                      cells. While wet chemical etching of the ZnO:Al is an
                      established process for the texturing, a laser-based process
                      offers higher flexibility and controllability of texture
                      scattering properties. Accordingly, the light trapping can
                      be engineered to fit the needs of a solar cell. Within this
                      work, five laser-based processing techniques are evaluated
                      for their applicability to texture ZnO:Al layers in an
                      industrial environment. The direct writing of textures is
                      capable of producing the right feature sizes and is highly
                      flexible. However, it has strong demands on the experimental
                      setup and requires long processing times. Refocusing the
                      laser light by a particle lens array as well as
                      laser-induced chemical etching also lack the industrial
                      feasibility due to the complex processing setup. The
                      creation of laser-induced periodical surface structures
                      (LIPSS) by ultra-short pulse lasers promises small feature
                      sizes with a simple setup. However, the flexibility of
                      feature sizes and shapes is limited. Only direct laser
                      interference patterning (DLIP) is capable of producing a
                      large variety of adjustable textures with right-sized
                      features while being able to cover large areas in reasonable
                      amounts of time with an industrial feasible processing
                      setup. To further investigate DLIP processing, a highly
                      exible three-beam interference setup was designed and
                      implemented. Within the setup, the beam properties of the
                      three partial beams can be adjusted completely
                      independently. By controlling power, polarization and angle
                      of incidence of the individual beams, the intensity
                      distribution within the overlapping volume is adjusted. This
                      intensity distribution then translates to a topography on
                      the ZnO:Al sample. With one single laser pulse, hundreds of
                      thousands strictly periodic micrometer and
                      submicrometer-sized features are created. [...]},
      cin          = {IEK-5},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {121 - Solar cells of the next generation (POF3-121)},
      pid          = {G:(DE-HGF)POF3-121},
      typ          = {PUB:(DE-HGF)3 / PUB:(DE-HGF)11},
      url          = {https://juser.fz-juelich.de/record/828398},
}